Atomic Layer Deposition for Semiconductors

by Cheol Seong Hwang (Ed.)

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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews histor

 

 

Details:

Amazon rank: #2,670,836

Price: $104.22


bound: 263 pages

Publisher: Springer; 2014 edition (October 18, 2013)

Language: English

ASIN: B00G0L9298

File size: 5731 KB

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Atomic Layer Deposition For Semiconductors Books Pdf File

 

 

 

 

 

 

 

 

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